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TFT Mask 規(guī)格
1、Normal Mask size (Unit: mm)
| TFT ARRAY | TFT CF |
| 152.4×152.4×6.4 | 450×550×5.0 |
| 330×450×5.0 | 508×609.6×5.0 |
| 390×610×6.0 | 700×800×8.0 |
| 520×610×10.0 | 800×920×8.0/10.0 |
| 520×800×10.0 | 800×960×8.0/10.0 |
| 800×920×10.0 | 850×1200×10.0 |
| 850×1200×10.0 | 850×1400×10.0 |
| 1220×1400×13.0 | 1220×1400×13.0 |
2、CD Specification (Unit: um)
| Grade | GTM | C | B | A |
| TFT ARRAY | ±0.1 | ±0.2 | ±0.35 | / |
| TFT CF | 0.2 | ±0.35 | ±0.50 | ±0.75 |
3、LTPS Mask Specification (Unit: um)
| CD MTT | CD Uniformity | Registration |
| 0.1 | ±0.1 | ±0.3 |